Sweeping the tilt angle can improve movie thickness uniformity and sidewall protection whilst also averting large Strength-mirrored neutral species for important processes.
In-situ optical checking and Manage is accessible by means of Angstrom’s optical checking & Regulate package deal.
Focus on rotation and carousel indexing Each individual have torque feeling, preventing any system troubles as a result of slips or jams in rotation.
The dimensions, place, and kit ratio of each and every planet are optimized to deliver the very best feasible movie thickness uniformity.
We use cookies to ensure you provide the smoothest experience navigating our web-site. This features collecting non-personally identifiable details for the duration of your browsing session, for instance: which pages you look through, what products you overview and how you connect with Angstrom.
Variable angle phases make it possible for for very highly effective thin film tactics. Even so, certainly one of its biggest worries is reproducibility. The substrate is usually set at a very oblique angle in relation on the supply, as well as the movies are certainly sensitive into the precision of the angle.
Angstrom Engineering® models and engineers each Reticle® System to provide our companions while in the optics Local community the ability to build the movies they want with fantastic purity, density, and uniformity, all in a very hugely repeatable and automated vogue.
Generally, a QCM is used to calibrate an initial deposition level just before finishing the layer thickness below time Regulate with a fixed beam present-day. Shuttering the crystal will greatly extend its running life span through very long processes or on units with a load lock.
Along with sample rotation, the variable angle stage that's utilized for Reticle® offers for in-built angular motion throughout the deposition flux.
All common Reticle® platforms consist of yet another gridless stop-Corridor ion source with hollow cathode neutralizer.
1 degree. Those splendidly slim tolerances allow us to continuously Molybdenum evaporation sources create really specific nanostructures. I'm able to say wholeheartedly the products and service Angstrom Engineering® sent has long been wonderful.
Self-aligned ion optics are configured specifically for the specified deposition demands and geometry of your process.
A lower-frequency neutralizer makes sure secure beam operation with out contamination from a traditional filament.
Dynamic uniformity shaping is realized employing a flux correction defend in between the deposition source and the substrate.
Considerate design in the ion beam concentrating optics confines the beam completely to the region with the target, getting rid of any threat of contamination.